DocumentCode
1853956
Title
An investigation of decoupling performance for a novel lateral axis gyroscope with varying environmental parameters
Author
Cui, Jian ; Liu, X.S. ; Zhao, Q.C. ; Lin, L.T. ; Chi, X.Z. ; Yang, Z.C. ; Yan, Guizhen
Author_Institution
Inst. of Microelectron., Peking Univ., Beijing, China
fYear
2009
fDate
21-25 June 2009
Firstpage
292
Lastpage
295
Abstract
This paper makes an investigation on the decoupling performance for a novel lateral axis gyroscope with varying environmental parameters. The testing results show that the decoupling performance of the gyroscope depends on the environment pressure and temperature. The coupling varies from 0.05% to 0.25% with the pressure range of 150 Pa to 100 kPa. The characteristic of coupling with temperature is measured from 20degC to 100degC, which varies from 0.35% to 0.41%. With the high quality factor and small coupling, the device can worked well even at atmospheric pressure. The sensitivity and nonlinearity are 6.7 mV/deg/s and 0.51% with full scale of 800deg/s, respectively.
Keywords
gyroscopes; micromechanical devices; atmospheric pressure; coupling characteristic; decoupling performance; lateral axis gyroscope; Fabrication; Gyroscopes; Micromechanical devices; Optical coupling; Robust stability; Springs; Structural beams; Temperature measurement; Temperature sensors; Testing; decoupling; lateral axis gyroscope; pressure; temperature;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location
Denver, CO
Print_ISBN
978-1-4244-4190-7
Electronic_ISBN
978-1-4244-4193-8
Type
conf
DOI
10.1109/SENSOR.2009.5285507
Filename
5285507
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