• DocumentCode
    1853956
  • Title

    An investigation of decoupling performance for a novel lateral axis gyroscope with varying environmental parameters

  • Author

    Cui, Jian ; Liu, X.S. ; Zhao, Q.C. ; Lin, L.T. ; Chi, X.Z. ; Yang, Z.C. ; Yan, Guizhen

  • Author_Institution
    Inst. of Microelectron., Peking Univ., Beijing, China
  • fYear
    2009
  • fDate
    21-25 June 2009
  • Firstpage
    292
  • Lastpage
    295
  • Abstract
    This paper makes an investigation on the decoupling performance for a novel lateral axis gyroscope with varying environmental parameters. The testing results show that the decoupling performance of the gyroscope depends on the environment pressure and temperature. The coupling varies from 0.05% to 0.25% with the pressure range of 150 Pa to 100 kPa. The characteristic of coupling with temperature is measured from 20degC to 100degC, which varies from 0.35% to 0.41%. With the high quality factor and small coupling, the device can worked well even at atmospheric pressure. The sensitivity and nonlinearity are 6.7 mV/deg/s and 0.51% with full scale of 800deg/s, respectively.
  • Keywords
    gyroscopes; micromechanical devices; atmospheric pressure; coupling characteristic; decoupling performance; lateral axis gyroscope; Fabrication; Gyroscopes; Micromechanical devices; Optical coupling; Robust stability; Springs; Structural beams; Temperature measurement; Temperature sensors; Testing; decoupling; lateral axis gyroscope; pressure; temperature;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
  • Conference_Location
    Denver, CO
  • Print_ISBN
    978-1-4244-4190-7
  • Electronic_ISBN
    978-1-4244-4193-8
  • Type

    conf

  • DOI
    10.1109/SENSOR.2009.5285507
  • Filename
    5285507