Title :
A simple micro pirani vasuum gauge fabricated by bulk micromachining technology
Author :
Zhang, Jinwen ; Jiang, Wei ; Zhou, Jilong ; Wang, Xin
Author_Institution :
Nat. Key Lab. of Micro/Nanometer Fabrication Technol., Peking Univ., Beijing, China
Abstract :
In this paper, a very simple micro vacuum pirani gauge made of single crystal silicon is presented. It was fabricated by standard bulk micromachining with only three masks. The high aspect ratio structure of the pirani gauge has large efficient gaseous heat transfer area, thus can increase the sensitivity of the pirani gauge. The dynamic range of the pirani gauge is 2 Pa to 400 Pa which should be larger if the power of the current source be larger with high sensitivity. And the average sensitivity is 184 K/W/Pa.
Keywords :
micromachining; vacuum gauges; bulk micromachining; vacuum packaging; vacuum pirani gauge; Biomembranes; Dielectric substrates; Dielectric thin films; Fabrication; Microcavities; Microelectromechanical devices; Micromachining; Packaging; Thermal conductivity; Vacuum technology; Vacuum packaging; bulk micromachining technology; pirani gauge; vacuum measurement;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285508
