An intelligent wind sensor system with auto-zero function

Author

Shen, G.P. ; Qin, M. ; Dong, Z.Q. ; Huang, Q.A.

Author_Institution

Key Lab. of MEMS of Minist. of Educ., Southeast Univ., Nanjing, China

fYear

2009

fDate

21-25 June 2009

Firstpage

256

Lastpage

259

Abstract

An intelligent wind sensor system including a novel 2-D wind sensor and the interface circuits was presented in this paper. The wind sensor was fabricated on the ceramic substrate using single lift-off process, and packaged by direct chip attach (DCA) packaging. Both the thermal and electrical feedbacks were used to cancel the offset of temperature drift. Full-bridges composed of thermistors were used for wind velocity and direction measurement. The wind tunnel test results show that the wind sensor can measure wind speeds up to 60 m/s, and wind direction in a full range of 360deg with a resolution within 2deg.

Keywords

ceramics; intelligent sensors; position measurement; substrates; thermistors; velocity measurement; wind; wind tunnels; 2D wind sensor; auto-zero function; ceramic substrate; direct chip attach packaging; electrical feedbacks; intelligent wind sensor system; interface circuits; single lift-off process; temperature drift; thermal feedbacks; thermistors; wind direction measurement; wind tunnel test; wind velocity measurement; Ceramics; Circuits; Feedback; Intelligent sensors; Intelligent systems; Packaging; Semiconductor device measurement; Sensor systems; Velocity measurement; Wind speed; Wind sensor; direct chip attach packaging; intelligent instrument; thermal feedback;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International

Conference_Location

Denver, CO

Print_ISBN

978-1-4244-4190-7

Electronic_ISBN

978-1-4244-4193-8

Type

conf

DOI

10.1109/SENSOR.2009.5285514

Filename

5285514