Title :
Design, Electro-Thermal simulation and geometrical optimization of double spiral shaped microheater on a suspended membrane for gas sensing
Author :
Velmathi, G. ; Ramshanker, N. ; Mohan, Swati
Author_Institution :
Dept. of Instrum., Indian Inst. of Sci., Bangalore, India
Abstract :
This paper is mainly focused on the optimization of the micromachined heater for gas sensing applications designed to withstand high-temperature. Different microheater geometries and dimensions have been investigated regarding their power consumption, temperature distribution over the sensing area and robustness when annealed at high temperature. The designed microheater withstood annealing temperatures of up to 700°C and moreover robustness of the silicon nitride membrane allowed the sensing area to be heated up to a high temperature 400-700°C.
Keywords :
annealing; gas sensors; heating elements; micromachining; microsensors; temperature distribution; thermal analysis; SiN; annealing; double spiral shaped microheater; electro-thermal simulation; gas sensing; geometrical optimization; microheater geometry; micromachined heater; power consumption; suspended membrane; temperature 400 C to 700 C; temperature distribution; Biomembranes; Resistance heating; Spirals; Temperature measurement; Temperature sensors; COMSOLTM; membrane; microheater; spiral shape; thermal imaging;
Conference_Titel :
IECON 2010 - 36th Annual Conference on IEEE Industrial Electronics Society
Conference_Location :
Glendale, AZ
Print_ISBN :
978-1-4244-5225-5
Electronic_ISBN :
1553-572X
DOI :
10.1109/IECON.2010.5675550
