MEMS fluid density sensor based on oscillating piezoresistive microcantilever

The working principle and fabrication process of MEMS density sensor have been studied in this paper. And the density experiments were performed in acetone and silicon oil at temperatures in the range from 20.0 to 50.0 °C under atmospheric pressure. The maximum deviation and the average absolute deviation between the density experimental results and the reference values are -0.72% and 0.32%, respectively. Because of the small volume of MEMS density sensor, the required fluid volume for experiment is small and doesn´t exceed 100 μL in general.