DocumentCode
1854583
Title
A novel method for amorphous metal micromolding using Carbon MEMS
Author
Martinez-Duarte, R. ; Madou, M.J. ; Kumar, G. ; Schroers, J.
Author_Institution
Mech. & Aerosp. Eng. Dept., Univ. of California Irvine, Irvine, CA, USA
fYear
2009
fDate
21-25 June 2009
Firstpage
188
Lastpage
191
Abstract
Here we describe a novel method for bulk metallic glass (BMG) micro molding using carbon templates obtained from pyrolyzed SU-8 photoresist. BMGs refer to a class of metal alloys which exhibit high strength, large elastic strain limit, and high corrosion resistance owing to their amorphous nature. They are isotropic, homogeneous, and free from any crystalline defects down to atomic scales. We have employed the carbon MEMS (C-MEMS) technique to derive molds of different geometries and dimensions. Resultant carbon structures are stable at very high temperatures and have sufficient mechanical strength to be used as master molds for the thermoplastic forming of BMGs.
Keywords
carbon; metallic glasses; micromechanical devices; moulding; photoresists; SU-8 photoresist; amorphous metal micromolding; bulk metallic glass; carbon MEMS; carbon structures; thermoplastic forming; Amorphous materials; Corrosion; Crystallization; Glass; Micromechanical devices; Rough surfaces; Surface finishing; Surface resistance; Surface roughness; Temperature; Bulk Metallic Glass; C-MEMS; Carbon; LIGA; Microfabrication; Molds; Thermoplastic Forming;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location
Denver, CO
Print_ISBN
978-1-4244-4190-7
Electronic_ISBN
978-1-4244-4193-8
Type
conf
DOI
10.1109/SENSOR.2009.5285533
Filename
5285533
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