• DocumentCode
    1854583
  • Title

    A novel method for amorphous metal micromolding using Carbon MEMS

  • Author

    Martinez-Duarte, R. ; Madou, M.J. ; Kumar, G. ; Schroers, J.

  • Author_Institution
    Mech. & Aerosp. Eng. Dept., Univ. of California Irvine, Irvine, CA, USA
  • fYear
    2009
  • fDate
    21-25 June 2009
  • Firstpage
    188
  • Lastpage
    191
  • Abstract
    Here we describe a novel method for bulk metallic glass (BMG) micro molding using carbon templates obtained from pyrolyzed SU-8 photoresist. BMGs refer to a class of metal alloys which exhibit high strength, large elastic strain limit, and high corrosion resistance owing to their amorphous nature. They are isotropic, homogeneous, and free from any crystalline defects down to atomic scales. We have employed the carbon MEMS (C-MEMS) technique to derive molds of different geometries and dimensions. Resultant carbon structures are stable at very high temperatures and have sufficient mechanical strength to be used as master molds for the thermoplastic forming of BMGs.
  • Keywords
    carbon; metallic glasses; micromechanical devices; moulding; photoresists; SU-8 photoresist; amorphous metal micromolding; bulk metallic glass; carbon MEMS; carbon structures; thermoplastic forming; Amorphous materials; Corrosion; Crystallization; Glass; Micromechanical devices; Rough surfaces; Surface finishing; Surface resistance; Surface roughness; Temperature; Bulk Metallic Glass; C-MEMS; Carbon; LIGA; Microfabrication; Molds; Thermoplastic Forming;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
  • Conference_Location
    Denver, CO
  • Print_ISBN
    978-1-4244-4190-7
  • Electronic_ISBN
    978-1-4244-4193-8
  • Type

    conf

  • DOI
    10.1109/SENSOR.2009.5285533
  • Filename
    5285533