Parylene background fluorescence study for biomems applications

Parylene is a commonly used material in bio-MEMS field. Background fluorescence of parylene film itself can be a major obstacle for parylene-based devices used in fluorescent detection. We report here an in-depth study of the fluorescence mechanisms of parylene-C and parylene-HT films with fluorescent microscopy, fluorimeter, and infrared spectroscopy. Influences of fabrication process on background fluorescence of the devices are discussed. Solutions to reduce background fluorescence are provided and effectiveness is confirmed. Parylene-HT is found to be a more promising candidate for Bio-MEMS applications for fluorescence concern. The methods and results are valuable to other polymer materials in MEMS field.