XPS investigation of surface secondary phase segregation in CIGS thin film

Cu(In, Ga)Se₂ (CIGS) thin films were deposited on Molybdenum (Mo) coated soda lime glass (SLG/Mo) substrates, using physical vapor deposition (PVD) 3-stage process. The Mo thin films were sputtered on SLG substrates using DC planar magnetron sputtering at a working gas (Ar) pressure that varies from 0.8 mT to 12 mT with a sputtering power density of 1.2 W/cm². The sputtering pressure of Mo thin films was varied in order to induce variations in the sputtered films´ morphology and porosity; as well as to subsequently induce variations in the Na out-diffusion from SLG substrate. The surface chemistry of CIGS thin films was investigated by X-Ray Photoelectron Spectroscopy (XPS). The XPS surface surveys (top 30A) and depth profiling survey (top 100A) for the elements, their chemical states, and their relative concentration were analyzed for CIGS thin films. The XPS surface analysis and composition of CIGS thin films were correlated to the bulk composition and Na out-diffusion in the CIGS films from SLG substrates.