Vacuum-gapped film bulk acoustic resonator for low-loss mass sensing in liquid

Author

Pottigari, Sai Sumanth ; Kwon, Jae Wan

Author_Institution

Univ. of Missouri - Columbia, Columbia, MO, USA

fYear

2009

fDate

21-25 June 2009

Firstpage

156

Lastpage

159

Abstract

This paper describes a novel design of a film bulk acoustic resonator (FBAR) without significant reduction of Q factor in liquid environments. The new design employs a vacuum gap to prevent acoustic energy loss in liquid. The Q factor was measured to be about 153 in the air and 140 in the water. We found that the Q factor is reduced only 9% in water, while the Q factor of a normal FBAR in the water is drastically decreased down to about 20 (more than 85% reduction). The device exhibited excellent liquid mass sensing capability due to the Q factor in liquid kept as high as in the air.

Keywords

acoustic resonators; bulk acoustic wave devices; chemical sensors; Q factor; liquid mass sensing; low loss mass sensing; vacuum gapped film bulk acoustic resonator; Acoustic devices; Acoustic sensors; Acoustic waves; Elasticity; Energy loss; Film bulk acoustic resonators; Q factor; Surface acoustic wave devices; Surface acoustic waves; Viscosity; Film Bulk Acoustic Resonator; Liquid Mass Sensing; Low Loss;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International

Conference_Location

Denver, CO

Print_ISBN

978-1-4244-4190-7

Electronic_ISBN

978-1-4244-4193-8

Type

conf

DOI

10.1109/SENSOR.2009.5285541

Filename

5285541