• DocumentCode
    1854846
  • Title

    Chemoresistive nanofibrous sensor array and read-out electronics on flexible substrate

  • Author

    Pecora, A. ; Maiolo, L. ; Zampetti, E. ; Pantalei, S. ; Valletta, A. ; Minotti, A. ; Maita, F. ; Simeone, D. ; Cuscunà, M. ; Bearzotti, A. ; Macagnano, A. ; Mariucci, L. ; Fortunato, G.

  • Author_Institution
    Inst. for Microelectron. & Microsyst., CNR-IMM, Rome, Italy
  • fYear
    2009
  • fDate
    21-25 June 2009
  • Firstpage
    144
  • Lastpage
    147
  • Abstract
    We present the design and fabrication of a chemoresistive sensor array for the volatile organic compounds and gas detection. Different nanofibrous conductive polymers, produced by electrospinning technique, have been used as chemical interactive materials. Sensor array was integrated with read-out electronic circuits on flexible substrate. In order to obtain high electrical performances maintaining integration capability, on plastic materials, respect to standard c-Si CMOS technology, polycrystalline silicon thin film transistor based circuitry has been used. The performances of the fabricated sensor array have been tested with different concentrations of methanol, lactic acid and ammonia.
  • Keywords
    conducting polymers; electrospinning; gas sensors; nanofibres; organic compounds; readout electronics; sensor arrays; silicon; thin film transistors; Si; ammonia; chemoresistive nanofibrous sensor array; conductive polymers; electrospinning; gas detection; lactic acid; methanol; read-out electronic circuits; silicon thin film transistor; volatile organic compounds; CMOS technology; Chemical sensors; Conducting materials; Electronic circuits; Fabrication; Gas detectors; Polymers; Sensor arrays; Substrates; Volatile organic compounds; Electrospinning; Sensor array; flexible substrate; read-out electronics;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
  • Conference_Location
    Denver, CO
  • Print_ISBN
    978-1-4244-4190-7
  • Electronic_ISBN
    978-1-4244-4193-8
  • Type

    conf

  • DOI
    10.1109/SENSOR.2009.5285542
  • Filename
    5285542