Title :
Chemoresistive nanofibrous sensor array and read-out electronics on flexible substrate
Author :
Pecora, A. ; Maiolo, L. ; Zampetti, E. ; Pantalei, S. ; Valletta, A. ; Minotti, A. ; Maita, F. ; Simeone, D. ; Cuscunà, M. ; Bearzotti, A. ; Macagnano, A. ; Mariucci, L. ; Fortunato, G.
Author_Institution :
Inst. for Microelectron. & Microsyst., CNR-IMM, Rome, Italy
Abstract :
We present the design and fabrication of a chemoresistive sensor array for the volatile organic compounds and gas detection. Different nanofibrous conductive polymers, produced by electrospinning technique, have been used as chemical interactive materials. Sensor array was integrated with read-out electronic circuits on flexible substrate. In order to obtain high electrical performances maintaining integration capability, on plastic materials, respect to standard c-Si CMOS technology, polycrystalline silicon thin film transistor based circuitry has been used. The performances of the fabricated sensor array have been tested with different concentrations of methanol, lactic acid and ammonia.
Keywords :
conducting polymers; electrospinning; gas sensors; nanofibres; organic compounds; readout electronics; sensor arrays; silicon; thin film transistors; Si; ammonia; chemoresistive nanofibrous sensor array; conductive polymers; electrospinning; gas detection; lactic acid; methanol; read-out electronic circuits; silicon thin film transistor; volatile organic compounds; CMOS technology; Chemical sensors; Conducting materials; Electronic circuits; Fabrication; Gas detectors; Polymers; Sensor arrays; Substrates; Volatile organic compounds; Electrospinning; Sensor array; flexible substrate; read-out electronics;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285542