DocumentCode
1854846
Title
Chemoresistive nanofibrous sensor array and read-out electronics on flexible substrate
Author
Pecora, A. ; Maiolo, L. ; Zampetti, E. ; Pantalei, S. ; Valletta, A. ; Minotti, A. ; Maita, F. ; Simeone, D. ; Cuscunà, M. ; Bearzotti, A. ; Macagnano, A. ; Mariucci, L. ; Fortunato, G.
Author_Institution
Inst. for Microelectron. & Microsyst., CNR-IMM, Rome, Italy
fYear
2009
fDate
21-25 June 2009
Firstpage
144
Lastpage
147
Abstract
We present the design and fabrication of a chemoresistive sensor array for the volatile organic compounds and gas detection. Different nanofibrous conductive polymers, produced by electrospinning technique, have been used as chemical interactive materials. Sensor array was integrated with read-out electronic circuits on flexible substrate. In order to obtain high electrical performances maintaining integration capability, on plastic materials, respect to standard c-Si CMOS technology, polycrystalline silicon thin film transistor based circuitry has been used. The performances of the fabricated sensor array have been tested with different concentrations of methanol, lactic acid and ammonia.
Keywords
conducting polymers; electrospinning; gas sensors; nanofibres; organic compounds; readout electronics; sensor arrays; silicon; thin film transistors; Si; ammonia; chemoresistive nanofibrous sensor array; conductive polymers; electrospinning; gas detection; lactic acid; methanol; read-out electronic circuits; silicon thin film transistor; volatile organic compounds; CMOS technology; Chemical sensors; Conducting materials; Electronic circuits; Fabrication; Gas detectors; Polymers; Sensor arrays; Substrates; Volatile organic compounds; Electrospinning; Sensor array; flexible substrate; read-out electronics;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location
Denver, CO
Print_ISBN
978-1-4244-4190-7
Electronic_ISBN
978-1-4244-4193-8
Type
conf
DOI
10.1109/SENSOR.2009.5285542
Filename
5285542
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