Title :
Single-side micromachined low-cost quad-cantilever sensors with a high-sensitive monolayer self-assembled for trace TNT detection
Author :
Xu, Pengcheng ; Chen, Ying ; Yang, Yongliang ; Liu, Yongjing ; Li, Jungang ; Zuo, Guomin ; Li, Xinxin
Author_Institution :
State Key Lab. of Transducer Technol., Chinese Acad. of Sci., Shanghai, China
Abstract :
A SiO2 quad-cantilever micro-sensor with a self-sensing piezoresistor integrated is developed for on-the-spot chemical detection. Four piezoresistors are integrated in four cantilevers and the sensing signal is outputted from a half-sensitive Wheatstone bridge. The new single-sided micromachining process features low-cost and high-yield. Modified with a novel self-assembled monolayer (SAM) on two sensing cantilevers, detection for the vapor of trinitrotoluene (TNT) achieves a resolution about tens of ppt.
Keywords :
chemical sensors; explosives; micromachining; microsensors; monolayers; piezoresistive devices; self-assembly; silicon compounds; SiO2; Wheatstone bridge; chemical detection; quad-cantilever sensors; self-assembled monolayer; self-sensing piezoresistor; trace trinitrotoluene detection; Biosensors; Chemical and biological sensors; Chemical technology; Chemical transducers; Etching; Fabrication; Gold; Piezoresistance; Resistors; Silicon; Microcantilever; Selfassembled monolayer; Trace TNT detection; low-cost high-yield process;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285547
