Title :
Self-aligned micro contact printing using MEMS
Author :
Choonee, K. ; Syms, R.R.A. ; Zou, H.
Author_Institution :
EEE Dept., Imperial Coll. London, London, UK
Abstract :
Aligned, multilevel micro contact printing without dedicated printing equipment is demonstrated. Miniature print engines are constructed from silicon parts using MEMS technology. The method is extended to include electrostatically driven patterning of flexible substrates.
Keywords :
micromechanical devices; nanopatterning; silicon; soft lithography; MEMS technology; Si; electrostatically driven patterning; flexible substrates; miniature print engines; multilevel microcontact printing; self-aligned microcontact printing; silicon parts; Coatings; Engines; Gold; Ink; Micromechanical devices; Printing; Rails; Silicon; Spraying; Viscosity; MEMS; Micro contact printing; electrostatic;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285554
