Nano temperature sensor using selective lateral growth of carbon nanotube between electrodes

Author

Gau, C. ; Chan, C.L. ; Shiau, S.H. ; Liu, C.W. ; Ting, S.H.

Author_Institution

Nat. Cheng Kung Univ., Tainan, Taiwan

fYear

2005

fDate

11-15 July 2005

Firstpage

857

Abstract

This paper presents lateral growth of carbon nanotube (CNT) between two electrodes and its use as nano temperature sensor. Fabrication of electrodes is made by MEMS techniques. The CNT is grown selectively by MPCVD between two electrodes. After wire bonding, the grown CNT is tested and calibrated. The growth conditions of CNT, such as the flow rate of CH₄ or N₂ gas, are varied to obtain a high quality CNT sensor. SEM is used to observe the shape and structure of CNT, while Raman spectrum analysis is used to indicate the degree of impurity and amorphous structure in the CNT. The I-V curve of CNT is measured at different temperature, and a very linear relationship between the electric resistance of CNT and the temperature is obtained. This result indicates that CNT can be used as a very good temperature sensor.

Keywords

Raman spectra; amorphous state; carbon nanotubes; electrical resistivity; electrochemical electrodes; nanotechnology; plasma CVD; scanning electron microscopy; temperature sensors; C; I-V curve; MEMS techniques; MPCVD; Raman spectrum analysis; SEM; amorphous structure; carbon nanotube; electric resistance; electrodes; impurity; nano temperature sensor; wire bonding; Bonding; Carbon nanotubes; Electrodes; Fabrication; Gas detectors; Micromechanical devices; Temperature measurement; Temperature sensors; Testing; Wire;

fLanguage

English

Publisher

ieee

Conference_Titel

Nanotechnology, 2005. 5th IEEE Conference on

Print_ISBN

0-7803-9199-3

Type

conf

DOI

10.1109/NANO.2005.1500668

Filename

1500668