Bistable switching with a thermoelectrically driven thermopneumatic actuator

We present for the first time a bistable thermopneumatic actuator that is based on thermoelectric temperature control. This concept shows several advantages over common thermopneumatic actuators: Due to an active cooling, the reaction time is decreased. Further, positive and negative displacements of the membrane are enabled and allow for a bistable switching. A novel fabrication technology is established and a prototype device is fabricated. Preliminary test results indicate a membrane displacement of 41 mum at an operation frequency of 3.8 Hz, which proves the feasibility of the concept.