A scanning micromirror with stationary rotation axis and dual reflective surfaces for 360° forward-view endoscopic imaging

Author

Wu, L. ; Xie, H.

Author_Institution

Dept. of Electr. & Comput. Eng., Univ. of Florida, Gainesville, FL, USA

fYear

2009

fDate

21-25 June 2009

Firstpage

2222

Lastpage

2225

Abstract

We report a novel dual-reflective MEMS mirror for full-circumferential-scanning (FCS) (360deg), forward-view endoscopic imaging applications. A unique electrothermal dual-folded-bimorph (DFB) actuator that can generate large rotation angles with a stationary rotation axis is employed. The fabricated devices demonstrate over 90deg mechanical rotation angles at frequencies up to 60 Hz with driving voltages of less than 12 V. A fast response with a cut-off frequency above the device´s mechanical resonance of 447 Hz has been achieved. FCS patterns have been experimentally obtained by combining both the mirror surfaces. The measured radius curvature and surface roughness of the mirror are about 0.65 m and 30 nm, respectively.

Keywords

endoscopes; micromechanical devices; micromirrors; surface roughness; dual-reflective MEMS mirror; electrothermal dual-folded-bimorph actuator; endoscopic imaging; full circumferential scanning; scanning micromirror; stationary rotation axis; surface roughness; Actuators; Cutoff frequency; Electrothermal effects; Micromechanical devices; Micromirrors; Mirrors; Resonance; Rough surfaces; Surface roughness; Voltage; Bimorph; Electrothermal actuation; Endoscopic imaging; Full circumferential scanning; Micromirror;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International

Conference_Location

Denver, CO

Print_ISBN

978-1-4244-4190-7

Electronic_ISBN

978-1-4244-4193-8

Type

conf

DOI

10.1109/SENSOR.2009.5285589

Filename

5285589