• DocumentCode
    1856363
  • Title

    Flexible carbon nanotubes electrode array for neural recording

  • Author

    Lin, Chia-Min ; Lee, Yu-Tao ; Yeh, Shih-Rung ; Fang, Weileun

  • Author_Institution
    Inst. of NanoEngineering & Microsyst., Nat. Tsing Hua Univ., Hsinchu, Taiwan
  • fYear
    2009
  • fDate
    21-25 June 2009
  • Firstpage
    2266
  • Lastpage
    2269
  • Abstract
    This paper demonstrates a novel flexible carbon nanotubes (CNTs) electrode array for neural recording. In this device, the CNTs electrode arrays are partially embedded into the flexible Parylene-C film using a batch microfabrication process. Through this fabrication process, the CNTs can be exposed to increase the total sensing area of an electrode. Thus, the flexible CNTs electrode of low impedance is realized. In application, the flexible CNTs electrode has been employed to record the neural signal of a crayfish nerve cord for in vitro recording. The measurements demonstrate the superior performance of the presented flexible CNTs electrode with low impedance (11.07 kOmega at 1 kHz) and high peak to peak amplitude action potential (about 410 muV). The simultaneous recording of the flexible CNTs electrode array is also demonstrated.
  • Keywords
    bioelectric potentials; biomedical electrodes; carbon nanotubes; microfabrication; nanotube devices; neurophysiology; polymer films; C; crayfish nerve cord; electrode array; flexible carbon nanotubes; flexible parylene-C film; frequency 1 kHz; impedance; microfabrication; neural recording; neural signal; Biological materials; Biomedical electrodes; Carbon nanotubes; Chemicals; Conducting materials; Fabrication; Impedance; In vitro; Polymer films; Silicon; CNT; flexible; low impedance; neural recording;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
  • Conference_Location
    Denver, CO
  • Print_ISBN
    978-1-4244-4190-7
  • Electronic_ISBN
    978-1-4244-4193-8
  • Type

    conf

  • DOI
    10.1109/SENSOR.2009.5285600
  • Filename
    5285600