DocumentCode
1856363
Title
Flexible carbon nanotubes electrode array for neural recording
Author
Lin, Chia-Min ; Lee, Yu-Tao ; Yeh, Shih-Rung ; Fang, Weileun
Author_Institution
Inst. of NanoEngineering & Microsyst., Nat. Tsing Hua Univ., Hsinchu, Taiwan
fYear
2009
fDate
21-25 June 2009
Firstpage
2266
Lastpage
2269
Abstract
This paper demonstrates a novel flexible carbon nanotubes (CNTs) electrode array for neural recording. In this device, the CNTs electrode arrays are partially embedded into the flexible Parylene-C film using a batch microfabrication process. Through this fabrication process, the CNTs can be exposed to increase the total sensing area of an electrode. Thus, the flexible CNTs electrode of low impedance is realized. In application, the flexible CNTs electrode has been employed to record the neural signal of a crayfish nerve cord for in vitro recording. The measurements demonstrate the superior performance of the presented flexible CNTs electrode with low impedance (11.07 kOmega at 1 kHz) and high peak to peak amplitude action potential (about 410 muV). The simultaneous recording of the flexible CNTs electrode array is also demonstrated.
Keywords
bioelectric potentials; biomedical electrodes; carbon nanotubes; microfabrication; nanotube devices; neurophysiology; polymer films; C; crayfish nerve cord; electrode array; flexible carbon nanotubes; flexible parylene-C film; frequency 1 kHz; impedance; microfabrication; neural recording; neural signal; Biological materials; Biomedical electrodes; Carbon nanotubes; Chemicals; Conducting materials; Fabrication; Impedance; In vitro; Polymer films; Silicon; CNT; flexible; low impedance; neural recording;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location
Denver, CO
Print_ISBN
978-1-4244-4190-7
Electronic_ISBN
978-1-4244-4193-8
Type
conf
DOI
10.1109/SENSOR.2009.5285600
Filename
5285600
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