A dual function Parylene-based biomimetic tactile sensor and actuator for next generation mechanically responsive microelectrode arrays

We present the first multimodal Parylene-based biomimetic platform with the ability to measure tactile forces while simultaneously enabling active stimulation/recording of neural tissue via movable microelectrodes. A liquid-filled microchamber encapsulating interdigitated microelectrodes performs the dual functions of actuation and tactile sensing. The electrodes are impedance-based tactile sensing elements and sites for electrolytic gas generation for pneumatic control of microelectrode position. Impedance sensitivity of up to 1.7 %/mum and out-of-plane positioning up to 8 mum were demonstrated. We also report on the mechanotransduction of biomimetic channel structures.