Title :
High-Q and low-Rm 24-MHz radial-contour mode disk resonators fabricated with silicon passive integration technology
Author :
Sworowski, M. ; Neuilly, F. ; Legrand, B. ; Summanwar, A. ; Lallemand, F. ; Philippe, P. ; Buchaillot, L.
Abstract :
A new approach for the fabrication of large contour-mode single-crystal silicon resonators has been demonstrated without the use of SOI substrates. 24-MHz-disk resonators have been built thanks to industrial facilities dedicated to the integration of passive components on silicon. They exhibit a good compromise between the quality factor Q higher than 50000 and the motional resistance of a few kilo-ohms.
Keywords :
Q-factor; crystal resonators; elemental semiconductors; micromechanical resonators; silicon; MEMS resonator; Si; frequency 24 MHz; high-Q resonator; passive integration technology; quality factor; radial-contour mode disk resonator; single-crystal resonator fabrication; Crystalline materials; Etching; Fabrication; Micromachining; Micromechanical devices; Q factor; Radio frequency; Silicon; Substrates; Transducers; Bulk Micromachining; MEMS Resonator; Single-Crystal Silicon;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285623
