Single-chip precision oscillators based on multi-frequency, high-Q aluminum nitride MEMS resonators

Author

Wojciechowski, K.E. ; Olsson, R.H., III ; Tuck, M.R. ; Roherty-Osmun, E. ; Hill, T.A.

Author_Institution

Sandia Nat. Labs., Albuquerque, NM, USA

fYear

2009

fDate

21-25 June 2009

Firstpage

2126

Lastpage

2130

Abstract

Aluminum nitride (AlN) contour mode resonators have been of interest because of their high quality factor, low impedance, large number of frequencies on a single chip and compatibility with CMOS processes. While AlN low insertion loss filters and oscillators have been demonstrated, CMOS integration has yet to be accomplished. This work represents the first time fully-released contour mode AlN microresonators have been integrated with CMOS circuitry to obtain completely monolithic frequency references.

Keywords

CMOS integrated circuits; Q-factor; aluminium compounds; filters; microsensors; oscillators; AlN; CMOS processes; contour mode microresonators; high quality factor; high-Q MEMS resonator; low insertion loss filters; monolithic frequency references; multifrequency MEMS resonators; single-chip precision oscillators; Aluminum nitride; CMOS process; Frequency; Impedance; Insertion loss; Microcavities; Micromechanical devices; Oscillators; Q factor; Resonator filters; Aluminum Nitride; CMOS; Integrated; MEMS; Monolithic; Oscillator; Pierce Oscillator; Resonator;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International

Conference_Location

Denver, CO

Print_ISBN

978-1-4244-4190-7

Electronic_ISBN

978-1-4244-4193-8

Type

conf

DOI

10.1109/SENSOR.2009.5285626

Filename

5285626