MEMS and nano/bio technologies

Author

Fujita, Hiroyuki

Author_Institution

Inst. of Ind. Sci., Tokyo Univ., Japan

fYear

2005

fDate

11-15 July 2005

Firstpage

195

Abstract

Besides rapid commercialization, MEMS is contributing to expand scientific frontiers in nano-scale and bio technology. A pair of probes with 10-50 nm tip radius were micromachined with integrated microactuators. Field emission, tunneling current and atomic transport were investigated in the gap between probes facing each other. The configuration was also applied to obtain nano tweezers that handle DNA molecules. For bio assay of enzymes, MEMS chips with fL-chambers and micro heaters were fabricated in which the enzymatic product was evaluated in a single molecular level. In addition, a conveyance device driven by bio motor molecules (microtubules and kinesin) was demonstrated.

Keywords

DNA; biomolecular electronics; biotechnology; enzymes; field emission; micromachining; micromechanical devices; molecular biophysics; nanotechnology; tunnelling; 10 to 50 nm; DNA molecules; MEMS chips; atomic transport; biomotor molecules; biotechnology; conveyance device; enzymatic bioassay; enzymatic product; field emission; integrated microactuators; kinesin; microtubules; molecular level; nanoscale technology; nanotweezers; single molecular assay; tunneling current; Atomic measurements; Cathodes; Commercialization; Microactuators; Micromechanical devices; Micromotors; Probes; Sensor arrays; Silicon; Tunneling;

fLanguage

English

Publisher

ieee

Conference_Titel

Nanotechnology, 2005. 5th IEEE Conference on

Print_ISBN

0-7803-9199-3

Type

conf

DOI

10.1109/NANO.2005.1500727

Filename

1500727