• DocumentCode
    1857034
  • Title

    Single walled carbon nanotubes as active elements in nano bridge based NEMS

  • Author

    Stampfer, Chirstoph ; Jungen, Alain ; Hierold, Christofer

  • Author_Institution
    Chair of Micro & Nanosytems, Swiss Fed. Inst. of Technol., Zurich, Switzerland
  • fYear
    2005
  • fDate
    11-15 July 2005
  • Firstpage
    203
  • Abstract
    We present the fabrication and characterization of a nanometer-scale electromechanical transducer based on individual single walled carbon nanotubes (SWNTs). Each nano electromechanical device incorporates one electrically connected suspended SWNT, which is placed underneath a freestanding metal bridge. By introducing a mechanical load to the freestanding bridge (e.g. by pushing with an AFM tip) the suspended SWNT is mechanically deformed (i.e. local deformation at the edges and axial strain in the branches) leading to a significant change in resistance of the SWNT. We present electrical, mechanical and electromechanical measurements and show that the resistance (Ro≈500 kΩ) increases (up to R≈1.5 MΩ) by mechanical deformation.
  • Keywords
    carbon nanotubes; deformation; electric resistance; nanoelectronics; nanotechnology; nanotube devices; transducers; AFM tip; active elements; electrical resistance; electromechanical measurements; freestanding metal bridge; mechanical deformation; mechanical load; nanobridge based nanometer-scale electromechanical transducer characterization; nanobridge based nanometer-scale electromechanical transducer fabrication; nanosensors; single walled carbon nanotubes; Bridges; Capacitive sensors; Carbon nanotubes; Chemical elements; Electric resistance; Electrical resistance measurement; Electromechanical devices; Fabrication; Nanoelectromechanical systems; Transducers;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nanotechnology, 2005. 5th IEEE Conference on
  • Print_ISBN
    0-7803-9199-3
  • Type

    conf

  • DOI
    10.1109/NANO.2005.1500729
  • Filename
    1500729