DocumentCode
1857034
Title
Single walled carbon nanotubes as active elements in nano bridge based NEMS
Author
Stampfer, Chirstoph ; Jungen, Alain ; Hierold, Christofer
Author_Institution
Chair of Micro & Nanosytems, Swiss Fed. Inst. of Technol., Zurich, Switzerland
fYear
2005
fDate
11-15 July 2005
Firstpage
203
Abstract
We present the fabrication and characterization of a nanometer-scale electromechanical transducer based on individual single walled carbon nanotubes (SWNTs). Each nano electromechanical device incorporates one electrically connected suspended SWNT, which is placed underneath a freestanding metal bridge. By introducing a mechanical load to the freestanding bridge (e.g. by pushing with an AFM tip) the suspended SWNT is mechanically deformed (i.e. local deformation at the edges and axial strain in the branches) leading to a significant change in resistance of the SWNT. We present electrical, mechanical and electromechanical measurements and show that the resistance (Ro≈500 kΩ) increases (up to R≈1.5 MΩ) by mechanical deformation.
Keywords
carbon nanotubes; deformation; electric resistance; nanoelectronics; nanotechnology; nanotube devices; transducers; AFM tip; active elements; electrical resistance; electromechanical measurements; freestanding metal bridge; mechanical deformation; mechanical load; nanobridge based nanometer-scale electromechanical transducer characterization; nanobridge based nanometer-scale electromechanical transducer fabrication; nanosensors; single walled carbon nanotubes; Bridges; Capacitive sensors; Carbon nanotubes; Chemical elements; Electric resistance; Electrical resistance measurement; Electromechanical devices; Fabrication; Nanoelectromechanical systems; Transducers;
fLanguage
English
Publisher
ieee
Conference_Titel
Nanotechnology, 2005. 5th IEEE Conference on
Print_ISBN
0-7803-9199-3
Type
conf
DOI
10.1109/NANO.2005.1500729
Filename
1500729
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