Title :
Multielement structure of mechanical resonant sensors and optical readout system for acoustic signal analysis
Author :
Paulish, Andrei G. ; Fedorinin, Victor N.
Author_Institution :
Novosibirsk branch of Inst. of Semicond. Phys., SB RAS, Novosibirsk
Abstract :
The multielement structure of mechanical resonant sensors for acoustic signal processing and analysis is offered. Microstrings various length and diameter with resonant frequencies over the range of 100 Hz - 20 kHz are used as resonant sensors. The techniques of the structure fabrication and the definition of resonant frequencies of string sensors are developed. The design of the optical readout system based on CMOS camera and the oscillation amplitude measurement procedure for the acoustic signal frequency spectrum definition are offered.
Keywords :
CMOS image sensors; acoustic signal detection; micromechanical devices; spectral analysis; CMOS camera; acoustic signal processing; frequency 100 Hz to 20 kHz; mechanical resonant sensors; optical readout system; oscillation amplitude measurement; Acoustic sensors; Acoustic signal processing; Mechanical sensors; Optical device fabrication; Optical sensors; Optical signal processing; Resonance; Resonant frequency; Sensor systems; Signal analysis; Acoustic signal analysis; micro-electromechanical systems; optical readout system; resonant sensors;
Conference_Titel :
Control and Communications, 2009. SIBCON 2009. International Siberian Conference on
Conference_Location :
Tomsk
Print_ISBN :
978-1-4244-2007-0
DOI :
10.1109/SIBCON.2009.5044847
