Title :
Nanoencoders based on arrays of single nanotube emitters
Author :
Dong, Lixin ; Subramanian, Arunkumar ; Nelson, Bradley J.
Author_Institution :
Swiss Fed. Inst. of Technol., Switzerland
Abstract :
Linear encoders for nanoscale position sensing based on single multiwalled carbon nanotube (MWNT) arrays are investigated from experimental, theoretical, and design perspectives. Vertically aligned single MWNTs are realized using a combination of e-beam lithography and plasma-enhanced chemical vapour deposition (PECVD) growth. Field emission properties of the array are investigated inside a scanning electron microscope (SEM) equipped with a 3-DOF nanorobotic manipulator with nanometer resolution functioning as a scanning anode. Lateral position of the scanning anode is sensed from the emission distribution. High resolution (best: 12.9 nm; practical: 38.0 nm) for lateral position sensing around an emitter has been realized.
Keywords :
carbon nanotubes; electron beam lithography; field emitter arrays; nanopositioning; nanotube devices; plasma CVD; position measurement; scanning electron microscopy; PECVD; SEM; e-beam lithography; emission distribution; field emission properties; lateral position sensing; linear encoders; nanoencoders; nanometer resolution; nanorobotic manipulator; nanoscale position sensing; plasma-enhanced chemical vapour deposition growth; scanning anode; scanning electron microscope; single nanotube emitter arrays; vertically aligned single multiwalled carbon nanotube arrays; Anodes; Carbon nanotubes; Chemical vapor deposition; Laser feedback; Lithography; Nanoscale devices; Nickel; Optical feedback; Plasma chemistry; Scanning electron microscopy;
Conference_Titel :
Nanotechnology, 2005. 5th IEEE Conference on
Print_ISBN :
0-7803-9199-3
DOI :
10.1109/NANO.2005.1500731
