DocumentCode :
1857325
Title :
Adhesion force mesurement between silicon and carbon nanotubes synthesized by chemical vapor deposition
Author :
Hashimoto, Aiko
Author_Institution :
Univ. of Tokyo, Tokyo, Japan
fYear :
2009
fDate :
21-25 June 2009
Firstpage :
2066
Lastpage :
2069
Abstract :
This paper reports on an evaluation of the adhesion force between silicon and carbon nanotubes (CNTs), which were directly synthesized on a silicon substrate by chemical vapor deposition (CVD). CNTs bridging between silicon tips were pushed with a force-sensing cantilever to break the adhesion between silicon and CNTs. We measured the force acting on the cantilever at the moment of breaking the adhesion between silicon and CNTs. This force was measured to be 28 nN.
Keywords :
adhesion; carbon nanotubes; chemical vapour deposition; force measurement; force sensors; substrates; C; Si; adhesion force measurement; carbon nanotubes; chemical vapor deposition; force-sensing cantilever; silicon substrate; silicon tips; Adhesives; Atomic force microscopy; Carbon nanotubes; Chemical vapor deposition; Ethanol; Fabrication; Force measurement; Force sensors; Hydrogen; Silicon; Adhesion force; Carbon nanotubes; Chemical vapor deposition;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
Type :
conf
DOI :
10.1109/SENSOR.2009.5285641
Filename :
5285641
Link To Document :
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