Adhesion force mesurement between silicon and carbon nanotubes synthesized by chemical vapor deposition

Author

Hashimoto, Aiko

Author_Institution

Univ. of Tokyo, Tokyo, Japan

fYear

2009

fDate

21-25 June 2009

Firstpage

2066

Lastpage

2069

Abstract

This paper reports on an evaluation of the adhesion force between silicon and carbon nanotubes (CNTs), which were directly synthesized on a silicon substrate by chemical vapor deposition (CVD). CNTs bridging between silicon tips were pushed with a force-sensing cantilever to break the adhesion between silicon and CNTs. We measured the force acting on the cantilever at the moment of breaking the adhesion between silicon and CNTs. This force was measured to be 28 nN.

Keywords

adhesion; carbon nanotubes; chemical vapour deposition; force measurement; force sensors; substrates; C; Si; adhesion force measurement; carbon nanotubes; chemical vapor deposition; force-sensing cantilever; silicon substrate; silicon tips; Adhesives; Atomic force microscopy; Carbon nanotubes; Chemical vapor deposition; Ethanol; Fabrication; Force measurement; Force sensors; Hydrogen; Silicon; Adhesion force; Carbon nanotubes; Chemical vapor deposition;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International

Conference_Location

Denver, CO

Print_ISBN

978-1-4244-4190-7

Electronic_ISBN

978-1-4244-4193-8

Type

conf

DOI

10.1109/SENSOR.2009.5285641

Filename

5285641

Link To Document

https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1857325