Title :
Active nanocrystals for MOEMS
Author :
Lyshevski, Marina Alexandra
Author_Institution :
Microsyst. & Nanotechnol., NY, USA
Abstract :
This paper examines active crystals for high-performance nanotechnology-enhanced microscale opto-electro-mechanical systems (MOEMS). With the ultimate objective to deflect the beam in three-dimensional space, we study opto-electromagnetically-active crystals. With novel technology and control paradigm, super-high-performance MOEMS can be designed. The design, analysis and optimization tasks are forefront fundamental and technological challenges for advanced microsystems with MOEMS. These MOEMS support advanced far-reaching technology and can be uniquely utilized in nanolithography, optics, informatics, communication, computing, imaging, microscopy, diagnostics, biometrics and other areas.
Keywords :
adaptive optics; electro-optical devices; integrated optoelectronics; micromechanical devices; nanostructured materials; nanotechnology; optical design techniques; optical fabrication; active nanocrystals; advanced microsystems; biometrics; computing; control paradigm; diagnostics; high-performance nanotechnology-enhanced systems; imaging; informatics; microscale optoelectro-mechanical systems; microscopy; nanolithography; optics; opto-electromagnetically-active crystals; super-high-performance MOEMS; technological challenges; Biomedical optical imaging; Communication system control; Crystals; Design optimization; Informatics; Nanocrystals; Nanolithography; Optical computing; Optical imaging; Space technology;
Conference_Titel :
Nanotechnology, 2005. 5th IEEE Conference on
Print_ISBN :
0-7803-9199-3
DOI :
10.1109/NANO.2005.1500743
