Microlens formation technology utilizing multi-phase liquid ambiance

This research demonstrates a solid microlens formation technology to realize the plano-convex and biconvex lens in multi-phase liquid ambiance. The liquid polymer droplet is shaped by surface tension equilibrium in liquid-liquid and liquid-solid ambience. The radii of curvature of the lens are easily controlled by varying the liquid ambiance. The microlens is implemented using a commercial liquid-polymer dispensing system, and its dimensions can be precisely controlled. The microlens can either be a discrete optical component, or directly integrated with MEMS structures during the process to form a SiOB (silicon-optical-bench). To date, the plano-convex (X = 1) microlens with radius ranging 0.35 mm~2 mm and surface roughness <10 nm are fabricated, and the biconvex lens (0<X<1) is also demonstrated.