Title :
A mirror-tilt-insensitive Fourier transform spectrometer based on a large vertical displacement micromirror with dual reflective surface
Author :
Wu, Lei ; Pais, A. ; Samuelson, S.R. ; Guo, S. ; Xie, H.
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Florida, Gainesville, FL, USA
Abstract :
We report a miniature mirror-tilt-insensitive (MTI) Fourier transform spectrometer. A large-vertical-displacement (LVD) MEMS mirror is used to generate large scan range for high spectral resolution. The LVD MEMS mirror is also reflective on both surfaces. The maximum tilting angle of the MEMS mirror is 1.7deg for its entire 1-mm scan range. The combination of a corner-cube retroreflector and dual-reflective MEMS mirror has been used to compensate the mirror tilting successfully and resulted in high spectral resolution of 8.1 cm-1.
Keywords :
Fourier transform spectrometers; micro-optomechanical devices; micromirrors; spectrometer accessories; Fourier transform spectrometer; corner-cube retroreflector; dual-reflective MEMS mirror; large-vertical-displacement MEMS mirror; miniature mirror-tilt-insensitive spectrometer; mirror tilting compensation; spectral resolution; Biomedical optical imaging; Electrothermal effects; Fourier transforms; Micromechanical devices; Micromirrors; Mirrors; Optical interferometry; Optical sensors; Optical surface waves; Spectroscopy; Bimorph; Electrothermal actuation; Fourier transform spectrometer; Large-vertical-displacement; MEMS mirror; Mirror-tilt-insensitive;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285647
