A mirror-tilt-insensitive Fourier transform spectrometer based on a large vertical displacement micromirror with dual reflective surface

Author

Wu, Lei ; Pais, A. ; Samuelson, S.R. ; Guo, S. ; Xie, H.

Author_Institution

Dept. of Electr. & Comput. Eng., Univ. of Florida, Gainesville, FL, USA

fYear

2009

fDate

21-25 June 2009

Firstpage

2090

Lastpage

2093

Abstract

We report a miniature mirror-tilt-insensitive (MTI) Fourier transform spectrometer. A large-vertical-displacement (LVD) MEMS mirror is used to generate large scan range for high spectral resolution. The LVD MEMS mirror is also reflective on both surfaces. The maximum tilting angle of the MEMS mirror is 1.7deg for its entire 1-mm scan range. The combination of a corner-cube retroreflector and dual-reflective MEMS mirror has been used to compensate the mirror tilting successfully and resulted in high spectral resolution of 8.1 cm^-1.

Keywords

Fourier transform spectrometers; micro-optomechanical devices; micromirrors; spectrometer accessories; Fourier transform spectrometer; corner-cube retroreflector; dual-reflective MEMS mirror; large-vertical-displacement MEMS mirror; miniature mirror-tilt-insensitive spectrometer; mirror tilting compensation; spectral resolution; Biomedical optical imaging; Electrothermal effects; Fourier transforms; Micromechanical devices; Micromirrors; Mirrors; Optical interferometry; Optical sensors; Optical surface waves; Spectroscopy; Bimorph; Electrothermal actuation; Fourier transform spectrometer; Large-vertical-displacement; MEMS mirror; Mirror-tilt-insensitive;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International

Conference_Location

Denver, CO

Print_ISBN

978-1-4244-4190-7

Electronic_ISBN

978-1-4244-4193-8

Type

conf

DOI

10.1109/SENSOR.2009.5285647

Filename

5285647