Title :
Digitally-specified micromechanical displacement amplifiers
Author :
Lin, Yang ; Li, Wei-Chang ; Gurin, Ilya ; Li, Sheng-Shian ; Lin, Yu-Wei ; Ren, Zeying ; Kim, Bongsang ; Nguyen, Clark T C
Author_Institution :
Univ. of California at Berkeley, Berkeley, CA, USA
Abstract :
A micromechanical displacement amplifier comprising two asymmetric resonator array composites coupled by a quarter-wavelength beam has been demonstrated that permits specification of gain factor by mere (digital) selection of an appropriate ratio of the number of resonators in an input array to that in an output array. Like the method, this displacement gain circuit is a key enabler for resoswitch-based mechanical power amplifiers and power converters, because it can prevent unwanted drive electrode-to-resonator impact in such circuits. This design, however, differs from that in that 1) it can be applied to radial-contour mode disks that can achieve much higher frequency than the wine-glass disks; 2) it preserves the frequency and Q of its constituent resonators (whereas the method of changed the frequency and lowered the Q); and 3) its digital method for gain specification is much more straightforward, accurate, and repeatable.
Keywords :
micromechanical resonators; microswitches; power amplifiers; power convertors; digital gain; micromechanical displacement amplifier; power converters; quarter-wavelength beam; radial-contour mode disk; resoswitch-based mechanical power amplifier; two-asymmetric resonator array; wine-glass disk; Circuits; Drives; Electrodes; Frequency; Micromechanical devices; Power amplifiers; Radiofrequency amplifiers; Radiofrequency microelectromechanical systems; Resonance; Switches; Micromechanical devices; RF MEMS; displacement amplifier; power amplifier; power converter; radialcontour mode; resonant switch; resonator;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285651