Title :
On-chip soft-ferrite-integrated inductors for RF IC
Author :
Yang, C. ; Ren, T.L. ; Liu, L.T. ; Zhan, J. ; Wang, X. ; Wang, A. ; Wu, Z. ; Li, X.
Author_Institution :
Tsinghua Univ., Beijing, China
Abstract :
Systematic investigation of novel CMOS-compatible on-chip ferrite-integrated RF inductors is reported. New ferrite-fully-filled solenoid inductor is achieved, using low-temperature ferrite nano-powder-mixed-photoresist ink jetting/spin-coating technique we developed, which shows significant improvement of +160% in L and +220% in Q, to multi-GHz. An improved equivalent circuit for new ferrite-integrated inductors is developed. This work shows excellent prospects for making compact high-quality on-chip soft-ferrite-integrated inductors for RF SoCs.
Keywords :
Q-factor; equivalent circuits; ferrite devices; inductors; photoresists; radiofrequency integrated circuits; solenoids; spin coating; system-on-chip; CMOS-compatible solenoid inductor; Q factor; RFIC; SoC; equivalent circuit; low-temperature nanopowder-mixed-photoresist ink jetting; on-chip soft-ferrite-integrated inductor; spin-coating technique; Coils; Ferrite films; Filling; Inductance; Inductors; Micromechanical devices; Radio frequency; Radiofrequency integrated circuits; Solenoids; Spirals; Inductors; RF; Soft Ferrite;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285666
