Surface morphology and light scattering properties of the AZO/ITO bi-layer with native textured capability

Author

Liu, Jia-Hsiang ; Lin, Chien-Hung ; Yang, Chih-Chun ; Chan, I-Min

Author_Institution

TF RD Dev. Div., AU Optronics Corp., Taichung, Taiwan

fYear

2011

fDate

19-24 June 2011

Abstract

Light trapping, i.e. increasing the path length of incoming light, plays a decisive role for photovoltaic device performance for thin film silicon solar cells. This paper discusses way to demonstrate a bi-layer structure with high haze by using all dry process. Al doped ZnO (AZO:Al) film was continuously deposited on ITO precursor by pulse direct current magnetron sputtering. The various deposition temperature of the ITO glass substrate to improve the electrical and optical properties of AZO/ITO bi-layer transparent conductive oxides (TCOs) as transmittance, haze, surface morphology, sheet resistance (Rs), carrier concentration (n) and Hall mobility (μ). The AZO/ITO bi-layer presents excellent average Rs (4ω/sq), transmittance (81%) and haze (33%).

Keywords

Hall mobility; II-VI semiconductors; aluminium; elemental semiconductors; glass; solar cells; sputter deposition; surface morphology; zinc compounds; AZO/ITO bi-layer transparent conductive oxides; Hall mobility; ITO glass substrate; ITO precursor; Si; SiO₂; TCO; ZnO:Al-ITO; bi-layer structure; carrier concentration; deposition temperature; dry process; electrical properties; haze; light scattering properties; light trapping; native textured capability; optical properties; photovoltaic device performance; pulse direct current magnetron sputtering; sheet resistance; surface morphology; thin film silicon solar cells; transmittance; Glass; Indium tin oxide; Optical films; Substrates; Surface morphology; Temperature;

fLanguage

English

Publisher

ieee

Conference_Titel

Photovoltaic Specialists Conference (PVSC), 2011 37th IEEE

Conference_Location

Seattle, WA

ISSN

0160-8371

Print_ISBN

978-1-4244-9966-3

Type

conf

DOI

10.1109/PVSC.2011.6186037

Filename

6186037