Title :
Bulk acoustic wave resonators for infrared detection applications
Author :
Pisani, M.B. ; Kao, P. ; Tadigadapa, S.
Author_Institution :
Dept. of Electr. Eng., Pennsylvania State Univ., University Park, PA, USA
Abstract :
This paper reports on the fabrication and application of Y-cut temperature-sensitive quartz resonators for infrared detection applications. The high thermal sensitivity of the Y-cut quartz crystal (90 ppm/K) and the high quality factor (>10,000) of the piezoelectric bulk acoustic wave resonators fabricated from such crystals enable the application of these devices as extremely sensitive uncooled thermal infrared (IR) detectors. We report the fabrication and performance of inverted mesa devices with 1 mm diameter and 18 mum thickness with 6.8 kHz/K of temperature sensitivity at 90 MHz.
Keywords :
bulk acoustic wave devices; crystal resonators; infrared detectors; bulk acoustic wave resonator; frequency 90 MHz; infrared detection; piezoelectric resonator; size 1 mm; size 18 micron; temperature-sensitive quartz resonator; thermal sensitivity; Acoustic signal detection; Acoustic waves; Etching; Fabrication; Gold; Infrared detectors; Optical resonators; Packaging; Plasma temperature; Temperature sensors; Micromachined quartz resonators; Temperature sensitive quartz resonator; Uncooled infrared sensors;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285674
