DocumentCode
1858065
Title
Nanostructured Origami™ 3D fabrication and assembly of electrochemical energy storage devices
Author
In, Hyun Jin ; Kumar, Sundeep ; Shao-Horn, Yang ; Barbastathis, George
Author_Institution
Dept. of Mech. Eng., Massachusetts Inst. of Technol., Cambridge, MA, USA
fYear
2005
fDate
11-15 July 2005
Firstpage
374
Abstract
Using the Nanostructured Origami™ 3D Fabrication and Assembly Process, 3D nanostructured devices can be made from exclusively 2D micro- and nanofabrication tools. The origami approach consists of first patterning large 2D membranes and then folding them along predefined regions to obtain the desired 3D configuration. State-of-the art nanopatterning tools can be integrated into the process, and batch-fabrication can be achieved via several actuation methods that allow automated, parallel manipulation of the 2D segments. This paper reports on the application of the origami method to the fabrication of a supercapacitor, a type of an electrochemical energy storage device. The advantages of utilizing the 3rd dimension and nanostructured surfaces in such devices will be discussed.
Keywords
membranes; nanopatterning; supercapacitors; 2D microfabrication tools; 2D nanofabrication tool; 3D nanostructured device; Nanostructured Origami 3D Fabrication and Assembly Process; actuation methods; electrochemical energy storage device; microelectromechanical devices; nanopatterning; nanotechnology; supercapacitor; Assembly; Biomembranes; Electrochemical devices; Electrodes; Energy storage; Fabrication; Nanopatterning; Nanoscale devices; Silicon on insulator technology; Supercapacitors;
fLanguage
English
Publisher
ieee
Conference_Titel
Nanotechnology, 2005. 5th IEEE Conference on
Print_ISBN
0-7803-9199-3
Type
conf
DOI
10.1109/NANO.2005.1500774
Filename
1500774
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