Recent advances in interconnect technology for slim-base biomedical probe arrays

An interconnect technology for out-of-plane biomedical probe arrays has been demonstrated. The shafts of the probe array are assembled perpendicular to a common base or platform. During assembly of the probes a mechanical and electrical connection has been made. In order to assess the integrity of the assembly, a pulling test has been done. Recently the interconnect density has been improved to a pitch of 35 mum to realize the interconnects for active probe arrays.