Title :
Investigation of anti-stiction coating using π-conjugated hydrophobic self-assembled monolayer for ohmic contact MEMS switch
Author :
Yamashita, T. ; Itoh, T. ; Suga, T.
Author_Institution :
Univ. of Tokyo, Tokyo, Japan
Abstract :
This article discusses anti-stiction coating with conductive self-assembled monolayer (SAM) for ohmic contact microelectromechanical system (MEMS) switches. As we reported in the previous study, capillary force is a dominant factor of stiction in the air, and a hydrophobic SAM and Au coating can reduce the capillary force by preventing the formation of the liquid meniscus. In this study, we measured adhesion force and contact resistance for pi-conjugated hydrophobic SAM deposited on Au, and compared it with that of sigma-bonds formed hydrophobic SAM and Au sample surfaces. Our measurements indicate that pi-conjugated hydrophobic SAM is effective in preventing stiction for ohmic contact MEMS switches with low-load contact.
Keywords :
contact resistance; hydrophobicity; microswitches; monolayers; ohmic contacts; adhesion force; antistiction coating; capillary force; contact resistance; hydrophobic SAM; low-load contact; microelectromechanical system; ohmic contact MEMS switch; pi-conjugated hydrophobic self-assembled monolayer; Adhesives; Coatings; Electrical resistance measurement; Force measurement; Gold; Microelectromechanical systems; Micromechanical devices; Microswitches; Ohmic contacts; Switches; Contact resistance; MEMS switch; self-assembled monolayer; stiction;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285682
