DocumentCode
1858250
Title
Free accessible microchannel formed by wide range wettability control using nano-geometric surface
Author
Sugita, M. ; Sakuma, Shinya ; Arai, Fumihito
Author_Institution
Nagoya Univ., Nagoya, Japan
fYear
2012
fDate
4-7 Nov. 2012
Firstpage
212
Lastpage
214
Abstract
We succeeded in manipulating a microparticle in a free accessible microchannel formed by air-liquid interface by using the on-chip robot. To pattern the stable air-liquid interface in the microfluidic chip, we controlled the wettability of the surface using the nano-geometric surface, which was fabricated by the hybrid mask lithography technique using composite of photoresist and nanoparticle. By adjusting the density of nanopillar coated fluorocarbon or SiO2, the contact angle was controlled from 0 degree to 160 degree. Finally, we demonstrated the on-chip transfer and isolation of the microparticle by the developed free accessible microchannel and the MMT.
Keywords
bioMEMS; biological techniques; coating techniques; contact angle; lab-on-a-chip; masks; microchannel flow; microfabrication; nanofabrication; nanolithography; nanoparticles; organic compounds; photoresists; silicon compounds; wetting; MMT; SiO2; SiO2 density; air-liquid interface; contact angle; free accessible microchannel; hybrid mask lithography technique; microfluidic chip; microparticle isolation; nanogeometric surface; nanoparticle; nanopillar coated fluorocarbon density; on-chip robot; on-chip transfer; photoresist composite; surface wettability; wide range wettability control;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro-NanoMechatronics and Human Science (MHS), 2012 International Symposium on
Conference_Location
Nagoya
Print_ISBN
978-1-4673-4811-9
Type
conf
DOI
10.1109/MHS.2012.6492406
Filename
6492406
Link To Document