Title :
Using a genetic algorithm for exploring a semiconductor fabrication model
Author :
Sandoval, Rodrigo
Author_Institution :
TCAD Tech. Lead Synopsys R&D Center, Santiago
Abstract :
Initial iterations or generations of this particular Genetic Algorithm (GA) implementation for optimizing a semiconductor fabrication process, not only search for an optimal solution, but also, with the aid of a visual tool, help understanding the complex characteristics of the model. Finally, thanks to this visual analysis, some adjustments are proposed to the algorithm execution in order to drive the search more effectively, as explained using a reference TCAD simulation-based example.
Keywords :
CAD; electronic engineering computing; genetic algorithms; semiconductor device manufacture; semiconductor process modelling; TCAD; genetic algorithm; semiconductor fabrication model; visual tool; Algorithm design and analysis; Character generation; Circuits and systems; Fabrication; Genetic algorithms; Genetic mutations; Lead compounds; Research and development; Shape measurement; Surfaces;
Conference_Titel :
Devices, Circuits and Systems, 2008. ICCDCS 2008. 7th International Caribbean Conference on
Conference_Location :
Cancun
Print_ISBN :
978-1-4244-1956-2
Electronic_ISBN :
978-1-4244-1957-9
DOI :
10.1109/ICCDCS.2008.4542664
