Robust comb design for inductive displacement sensor with large travel and high sensitivity

We report on the increase of the sensitivity of variable reluctance inductive displacement sensors by the use of a novel comb configuration. In previous publications we showed that a comb configuration can be used to extend the traveling rage of electromagnetic actuators. This principle is now used for sensor applications. Experiments show an increase of sensitivity of 250% for a configuration of 8 comb fingers compared to previously reported designs featuring only one finger. Alternatively, very small air-gap widths can be avoided, rendering the sensors more robust and reliable to handle without sacrificing performance.