Title :
Nano-gyroscope device using field emission of isolated carbon nanotube
Author :
Zhan Yang ; Nakajima, Masahiro ; Yajing Shen ; Fukuda, Toshio
Author_Institution :
Dept. of Micro-nano Syst. Eng., Nagoya Univ., Nagoya, Japan
Abstract :
A gyroscope based on Coriolis effect and fabricated by Carbon Nanotube (CNT) will be presented. A CNT is vibration at x direction, when there a rotation around z direction, acceleration happens to the y direction. The natural frequency of MWCNT is depending on the inner diameter, outer diameter and length. The CNT was driven by the electrostatic force to its nature frequency. A CNT with a length of 1 μm was used for emitter and an anode with a bias angle is etched by Focused Ion Beam (FIB) which is set to the opposite to the CNT. An electrode is set near the CNT tip, which is employed to pulling the CNT for mechanical resonances by an AC voltage. The CNT with a resonate frequency of 1 MHz and mechanical quality factor Q of 10 k is simulated. The CNT gyroscope with a rotation speed of 0.1 rad/s, 1 rad/s 10 rad/s 20 rad/s, 100 rad/s 1000 rad/s and 10000 rad/s were simulated. The gyroscope is good sensitive till 100 rad/s.
Keywords :
Coriolis force; Q-factor; biomedical electrodes; biomedical electronics; carbon nanotubes; field emission; focused ion beam technology; gyroscopes; nanobiotechnology; potential energy functions; sputter etching; AC voltage; CNT gyroscope; Coriolis effect; MWCNT natural frequency; acceleration; anode; bias angle; carbon nanotube; diameter length; electrode; electrostatic force; emitter; field emission; focused ion beam; frequency 1 MHz; mechanical quality factor; mechanical resonance; nano-gyroscope device; rotation speed; size 1 mum; CNT; Field Emission; Gyroscope; Nanorobotic Manipulation; Resonance;
Conference_Titel :
Micro-NanoMechatronics and Human Science (MHS), 2012 International Symposium on
Conference_Location :
Nagoya
Print_ISBN :
978-1-4673-4811-9
DOI :
10.1109/MHS.2012.6492418