Flexible 3D channels and cavities formation by nanoimprinting

Nanoimprinting technique called reversal imprinting is developed to produce flexible 3-dimensional 3D nanostructures. A sealed 3D nanochannel networks is developed using sequentially stacked thermal nanoimprint lithography on planarized self-supporting dielectric sealing material over polymer sacrificial layers. Moreover, a 3D polymeric micro and nanostructures are generated using a duo-mold imprinting process. The unique patterning capabilities of this patterning technique are difficult to accomplish using conventional patterning techniques.