• DocumentCode
    1859058
  • Title

    Optics and emission imaging of a LaB6 emitter

  • Author

    Katsap, Victor ; Lai, Chising

  • Author_Institution
    NuFlare Technol. America, Hopewell Junction, VA, USA
  • fYear
    2015
  • fDate
    27-29 April 2015
  • Firstpage
    1
  • Lastpage
    1
  • Abstract
    LaB6 cathode is the emitter of choice in electron beam lithography tools. In commercial LaB6 cathodes, the (100) crystalline plane is used as the emissive surface. Typical size of emitter is ~70 μm DIA. Quality control is usually done by observing (100) surface with a powerful microscope. Emission images of the same cathodes often reveal irregularities practically invisible or barely visible neither in optical microscope nor in SEM. We have obtained emission images of the LaB6 cathodes and compared them to optical and SEM images.
  • Keywords
    cathodes; electron beam lithography; lanthanum compounds; optical microscopes; optics; scanning electron microscopy; LaB6; SEM; cathodes; crystalline plane; electron beam lithography; emission images; emission imaging; emissive surface; emitter; optical microscope; quality control; size 70 mum; Cathodes; Lithography; Microscopy; Optical imaging; Optical microscopy; Stimulated emission; LaB6 cathode; e-beam lithography; emission imaging;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Electronics Conference (IVEC), 2015 IEEE International
  • Conference_Location
    Beijing
  • Print_ISBN
    978-1-4799-7109-1
  • Type

    conf

  • DOI
    10.1109/IVEC.2015.7223744
  • Filename
    7223744
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1859058