Characterization of coplanar waveguides on MCM-D silicon substrate

Author

Liu, L. ; Lin, F. ; Kooi, P.S. ; Leong, M.S.

Author_Institution

Dept. of Electr. Eng., Nat. Univ. of Singapore, Singapore

Volume

3

fYear

1999

fDate

1999

Firstpage

865

Abstract

This paper presents the characteristics of coplanar waveguides (CPW) on silicon substrates fabricated through the MCM-D process. The propagation constant and characteristic impedance are measured at frequencies from 0.05 GHz to 10.05 GHz, using a vector analyzer, and with LRRM on-wafer calibration techniques followed with a de-embedding procedure. Two quasi-TEM models are developed to account for the EM affects in the CPW structure: the distributed equivalent elements RLGC were modeled by both closed-form approximation and fully lumped-equivalent circuits. The calculated characteristics show good agreement with the measured ones. The proposed models should be useful for the analysis and design of RFIC on silicon

Keywords

MMIC; coplanar waveguides; electric impedance; equivalent circuits; lumped parameter networks; multichip modules; 0.05 to 10.05 GHz; CPW; EM affects; LRRM on-wafer calibration techniques; MCM-D Si substrate; RFIC analysis; RFIC design; Si; characteristic impedance; closed-form approximation; coplanar waveguides; de-embedding procedure; distributed equivalent elements; fully lumped-equivalent circuits; propagation constant; quasi-TEM models; vector analyzer; Calibration; Capacitance; Coplanar waveguides; Frequency dependence; Frequency measurement; Impedance; Propagation constant; Silicon; Strips; Transmission line theory;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Conference, 1999 Asia Pacific

Print_ISBN

0-7803-5761-2

Type

conf

DOI

10.1109/APMC.1999.833730

Filename

833730