Title :
An ESD preotection device using normally-on MEMS switch
Author :
Ikehashi, Tamio ; Saito, Tomohiro
Author_Institution :
Semicond. Co., Toshiba Corp., Yokohama, Japan
Abstract :
We investigate normally-off and normally-on MEMS switches as ESD protection devices. The normally-on type switch behaves as an ESD protection only when the system power is off. We show that the optimized normally-on switch realizes >4000 V HBM-ESD robustness with parasitic capacitance as small as 1.8 fF.
Keywords :
capacitance; electrostatic discharge; microswitches; ESD protection device; electrostatic discharge; human body model; normally-off MEMS switch; normally-on MEMS switch; parasitic capacitance; system power; Actuators; Electrodes; Electrostatic discharge; Micromechanical devices; Microswitches; Parasitic capacitance; Power semiconductor switches; Protection; System testing; Voltage; Electro Static Discharge; Human Body Model; Micro Electro Mechanical Systems;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285717
