Exploring parametric resonance effects in bulk-mode CMOS-MEMS resonators

This digest paper describes an experimental exploration of parametric resonance and amplification effects in a `dog-bone´-shaped bulk-mode resonator, enabled by CMOS-MEMS technology, by employing electrical excitation and optical detection. In the initially very stiff bulk-mode resonators where efficient parametric pumping is challenging, we have achieved linear resonance signal amplification with gain of ~5, and also observed strong phase dependency of the parametric effects. By tuning the phase of parametric pumping, we can amplify or de-amplify (gain is less than 1) the resonance response. We have also found enhancement of quality (Q) factor for the bulk-mode resonance (at 10mTorr), from initial value of Q~1900 to Q~2130 by parametric pumping.