Title :
Si MEMS disk resonator supported by double-ended tuning fork absorbers
Author :
Ohtsuka, Toshiyuki ; Kageyama, Masayuki ; Iwai, Y. ; Tashiro, Asato ; Kamijo, Atsushi ; Kimura, N.
Author_Institution :
Mater. & Devices Res. Center, Nihon Dempa Kogyo Co., Ltd., Saitama, Japan
Abstract :
Compound (2,1)-mode Silicon (Si) disk resonators with double ended tuning fork (DETF) absorbers connected to anchors have been proposed to reduce the vibration energy leak into the Si substrate through anchors. The optimal dimensions of DETF absorber was evaluated by minimizing strain energy calculated from FEM. Si disk resonators with and without the DETF absorbers were fabricated by means of surface MEMS (Micro-Electro-Mechanical System) process. The resonator with optimal DETF absorber exhibits Q ≥ 170,000, whereas Q = 80,000 for the reference one.
Keywords :
anchors; finite element analysis; micromechanical resonators; silicon compounds; vibrations; DETF absorbers; FEM; MEMS disk resonator; Si; anchors; compound-mode silicon disk resonators; double-ended tuning fork absorbers; finite element method analysis; microelectro-mechanical system process; strain energy minimization; vibration energy leak reduction; Compounds; Electrodes; Micromechanical devices; Semiconductor device measurement; Silicon; Strain; Vibrations; 1)-mode disk resonater; Si MEMS; anchor loss; compound (2; double ended tuning fork;
Conference_Titel :
Frequency Control Symposium (FCS), 2014 IEEE International
Conference_Location :
Taipei
DOI :
10.1109/FCS.2014.6859933
