A curvature controlled flexible silicon micro electrode array to wrap neurons for signal analysis

Author

Kim, Jun-Hyoung ; Kubota, Masanori ; Higo, Akio ; Abe, Hideki ; Oka, Yoshitaka ; Mita, Yoshio

Author_Institution

Univ. of Tokyo, Tokyo, Japan

fYear

2009

fDate

21-25 June 2009

Firstpage

1810

Lastpage

1813

Abstract

A brand-new flexible microelectrodes array device is made with silicon and polymer MEMS technology. The device can ldquowraprdquo a single axon of a neuron with uniform curvature radius predefined by the integrated ldquocurvature limiterrdquo. The device can measure 3-dimensional potential distribution around the axon surface. By this we are intending to verify if the assumption that an axon works as a 1-dimensional wire is correct or not. This would be the world´s first attempt to measure an axon 3-dimensionally.

Keywords

bioMEMS; bioelectric potentials; biomedical electrodes; biomedical equipment; biomedical measurement; microelectrodes; neurophysiology; silicon; 3-dimensional axon potential distribution measurement; Si; curvature control mechanism; flexible silicon microelectrodes array device; neuron signal analysis; polymer MEMS technology; Electrodes; Neurons; Signal analysis; Silicon; curvature limiter; etching selectivity; flexible silicon device; neural probe;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International

Conference_Location

Denver, CO

Print_ISBN

978-1-4244-4190-7

Electronic_ISBN

978-1-4244-4193-8

Type

conf

DOI

10.1109/SENSOR.2009.5285726

Filename

5285726