Title :
Catalyst-free GaN nanorods grown by metalorganic molecular beam epitaxy
Author :
Kuo, S.Y. ; Kei, C.C. ; Chao, C.K. ; Hsiao, C.N. ; Lai, F.I. ; Kuo, H.C. ; Hsieh, W.F. ; Wang, S.C.
Author_Institution :
Precision Instrum. Dev. Center, Nat. Appl. Res. Lab., Hsinchu, Taiwan
Abstract :
Without a catalyst or template layer, GaN nanorods were successfully grown on c-sapphire substrates by RF-radical source metalorganic molecular beam epitaxy (RF-MOMBE). XRD, SEM, TEM, EDX and micro-PL were employed to characterize the structural and optical properties of GaN nanorods. The growth of GaN nanorods was uniformly observed across the substrate surface. These nanorods have an average diameter of 50 nm. and the rod number density can reach 1×1010 cm-2 depending on the growth parameters. The clear lattice fringes in HRTEM image revealed the growth of high quality hexagonal single-crystal GaN nanorods and no droplet was observed at the end of the nanorods. Meanwhile, EDX analysis revealed that gallium and nitrogen as the only detectable elements. Room-temperature photoluminescence of GaN nonorods showed a band-edge-emission at the energy position of ∼3.4 eV. The catalyst-free growth mechanism of GaN nanorods was discussed on the basis of experimental results in this work. These high-quality and high-density GaN nanorods might be useful for practical applications in nanoscale optoelectronic and electronic devices.
Keywords :
III-V semiconductors; X-ray chemical analysis; X-ray diffraction; band structure; chemical beam epitaxial growth; gallium compounds; molecular beam epitaxial growth; nanostructured materials; nanotechnology; photoluminescence; scanning electron microscopy; semiconductor growth; transmission electron microscopy; wide band gap semiconductors; 293 to 298 K; 50 nm; Al2O3; EDX; GaN; HRTEM; RF-MOMBE; RF-radical source metalorganic molecular beam epitaxy; SEM; TEM; XRD; band-edge-emission; c-sapphire substrates; catalyst-free GaN nanorods; hexagonal single-crystal; lattice fringe; metalorganic molecular beam epitaxy; microPL; nanoscale electronic devices; nanoscale optoelectronic devices; number density; optical properties; room-temperature photoluminescence; structural properties; substrate surface; template layer; Gallium nitride; Molecular beam epitaxial growth; Molecular beams; Nanoscale devices; Nanotechnology; Nitrogen; Optical microscopy; Scanning electron microscopy; Substrates; X-ray scattering;
Conference_Titel :
Nanotechnology, 2005. 5th IEEE Conference on
Print_ISBN :
0-7803-9199-3
DOI :
10.1109/NANO.2005.1500831