Title :
Torque measurements of an automotive halfshaft utilizing a MEMS resonant strain gauge
Author :
Myers, D.R. ; Pisano, A.P.
Author_Institution :
Berkeley Sensor & Actuator Center, Univ. of California at Berkeley, Berkeley, CA, USA
Abstract :
This work presents the adaptation of a MEMS double ended tuning fork resonant strain gauge to torque sensing applications. The gauge is oriented to measure torque induced shear strain. The strain gauge is epoxy bonded onto an automotive halfshaft and resonated using a square wave oscillator circuit. For this system, the MEMS resonant sensor has a torque sensitivity of 10.55 Hz/Nm (46 ppm/Nm), which is comparable to other high sensitivity torque transducers [1]. Furthermore, the system may resolve 0.01 muisin (0.005 Nm) in a 4 kHz bandwidth.
Keywords :
automotive components; micromechanical resonators; microsensors; oscillators; strain gauges; torque; vibrations; MEMS resonant sensor; MEMS resonant strain gauge fabrication; automotive halfshaft; shear strain; square wave oscillator circuit; torque measurement; torque sensing application; tuning fork; Automotive engineering; Bonding; Capacitive sensors; Circuit optimization; Micromechanical devices; Oscillators; Resonance; Strain measurement; Torque measurement; Vibrations; DETF; Double Ended Tuning Fork; Drive-Axle; Gage; Gauge; Halfshaft; MEMS; Sensor; Strain; Torque;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285735
