Title :
New electromagnetic transduction micro-sensor concept for passive wireless pressure monitoring application
Author :
Jatlaoui, M.M. ; Chebila, F. ; Gmati, I. ; Pons, P. ; Aubert, H.
Author_Institution :
LAAS, CNRS, Toulouse, France
Abstract :
In this communication we present a new and different approach based on electromagnetic transduction principle, which can be used for long distance covering pressure measurement. Previous work reported by the authors has validated the principle of the electromagnetic transduction for 400 mum silicon membrane thickness and with the hypothesis of uniform vertical membrane displacement. In this new report we investigate the effect of the silicon membrane thickness on electromagnetic transduction sensitivity. Moreover the completely passive wireless monitoring pressure micro-sensor is reported by taking into account the real deflection of the silicon membrane under pressure. This communication is focused only on the pressure measurement cell.
Keywords :
electromagnetic devices; elemental semiconductors; membranes; microsensors; pressure measurement; pressure sensors; semiconductor devices; silicon; wireless sensor networks; Si; electromagnetic transduction microsensor; electromagnetic transduction sensitivity; long distance measurement; passive wireless pressure monitoring; pressure measurement; silicon membrane thickness; Acoustic sensors; Biomembranes; Monitoring; Permittivity; Pressure measurement; Radio frequency; Sensor systems; Silicon; Transceivers; Wireless sensor networks; Anodic Bonding; Electromagnetic transduction; Passive Wireless Pressure micro-sensor; Pressure Probe Module; planar resonator;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285739
