3DOF equivalent circuit model of a comb-drive actuator

Author

Nishimori, Y. ; Fujiwara, N. ; Ooiso, H. ; Tuchiya, T. ; Mochizuoki, S. ; Hashiguchi, G.

Author_Institution

Res. Inst. of Electron., Shizuoka Univ., Hamamatsu, Japan

fYear

2009

fDate

21-25 June 2009

Firstpage

1758

Lastpage

1761

Abstract

We have derived a 3DOF (degree of freedom) mechanical equivalent circuit of a comb-drive actuator from Lagrange equation and applied it to simulation of an asymmetrical comb-drive actuator, and we can obtain that experimental data is in good agreement with the simulation. We also mentioned the quadric model of a comb-drive actuator which should be used under no DC bias operation. Using these models complicated MEMS devices are represented fully by an electrical equivalent circuit including mechanical parts, and can be simulated only by electrical simulator such as SPICE.

Keywords

equivalent circuits; microactuators; 3 degree of freedom; 3DOF; DC bias operation; MEMS devices; comb-drive actuator; equivalent circuit model; Actuators; Circuit simulation; Equivalent circuits; Fingers; Gyroscopes; Lagrangian functions; Microelectromechanical devices; Micromechanical devices; Oscillators; Parasitic capacitance; comb-drive actuator; equivalent circuit; gyroscope; oscillator;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International

Conference_Location

Denver, CO

Print_ISBN

978-1-4244-4190-7

Electronic_ISBN

978-1-4244-4193-8

Type

conf

DOI

10.1109/SENSOR.2009.5285743

Filename

5285743