Title :
Improved performance of large stroke comb-drive actuators by using a stepped finger shape
Author :
Engelen, J.B.C. ; Lantz, M.A. ; Rothuizen, H.E. ; Abelmann, L. ; Elwenspoek, M.C.
Author_Institution :
MESA+ & IMPACT Res. Institutes, Univ. of Twente, Enschede, Netherlands
Abstract :
In this work we describe an electrostatic mass-balanced planar x/y-scanner, using an optimized comb finger shape, designed for parallel-probe storage applications. We show a new stepped comb finger shape design, that has superior force/displacement characteristics leading to a larger stroke at the same voltage and a larger available force compared to straight or tapered shapes.
Keywords :
electrostatic actuators; finite element analysis; microactuators; probes; MEMS; electrostatic actuator; electrostatic mass-balanced planar x/y-scanner; finite-element analysis; large stroke comb-drive actuators; parallel-probe storage; stepped finger shape; Capacitance; Electric shock; Electrostatic actuators; Energy consumption; Etching; Fingers; Force control; Probes; Shape; Springs; DRIE; MEMS; Probe storage; comb drive; electrostatic actuator; finite-element analysis (FEA);
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285744
